- faculty profiles
- KUBODERA Shoichi
|Specialized field||Atomic/molecular/quantum electronics, plasma
Applied optics/quantum optical engineering
Electronic device/electronic equipment
|Classes||Project Studies A
Fundamental Optical Physics
Introduction to Laser Science
Advanced laser engineering
Selected Topics on Information Transmissions
Advanced Research of Information Transmissions
Advanced Course of Information Systems
Advanced Study of Information Systems
|Research theme||1. High-intensity vacuum ultraviolet laser system and applications
2. Development of extreme ultraviolet emission sources for the next generation lithography system
3. Rare gas excimers production in high-pressure rare gases
4. Laser processing for optical fiber sensors
Information Systems Science of Graduate school of engineering
Major fields Laser engineering, Quantum electronics Academic experience Keio University, Department of Electrical Engineering, B. S. (March 1985)
Keio University, Graduate School, Department of Electrical Engineering, M. S. (March 1988).
Rice University, Department of Electrical and Computer Engineering, Ph. D. (May 1991)
RIKEN Institute, Laser Science Group, Special Researcher of Basic Science (June 1991)
University of Miyazaki, Department of Electrical and Electronic Engineering, Associate Professor (January 1994)
University of Miyazaki, Cooperative Research Center, Associate Professor (April 2000)
University of Miyazaki, Department of Electrical and Electronic Engineering, Professor (March 2006)
Soka University, Department of Science and Engineering, Professor (April 2016)
Publications Masanori Kaku, Daichi Kai, Masahito Katto, Atsushi Yokotani, Shoichi Kubodera, and Wataru Sasaki, “Surface analysis by photo-stimulated desorption using tunable VUV radiation”, Appl. Phys. B, vol. 119, issue 3, pp. 427-433, (May 2015).
Masahito Katto, Masanori Kaku, Atsushi Yokotani, Kenzo Miyazaki, Noriaki Miyanaga, and Shoichi Kubodera, “Development of ultrashort pulsed VUV laser and its applications”, Journal of Laser Micro/Nanoengineering (JLMN), vol. 9, No. 2, pp. 108-112 (July 2014).
H. Daido, Y. Suzuki, T. Kawachi, T. Fukuda, T. Nakagiri, M. Kaku, and S. Kubodera, “Demonstration of partially transparent thick metallic sodium in the vacuum ultraviolet spectral range”, Opt. Exp. vol. 21, no. 23, pp. 28182-28188 (November 2013).
Yuta Matsuura, Masanori Kaku, and Shoichi Kubodera, “Enhancement of extreme ultraviolet radiations from a laser-produced plasma using copper-tungsten alloy”, Appl. Phys. B vol. 110, no. 3, pp. 397-400 (March 2013).
Masanori Kaku, Yusuke Sato, and Shoichi Kubodera, “Quasi-point incoherent ArF* excimer emission source at 193 nm using a laser-produced plasma”, Appl. Phys. B vol. 107, no. 1, pp. 85-89 (April 2012).
Masanori Kaku, Shinya Harano, Ryota Matsumoto, Masahito Katto, and Shoichi Kubodera, “Amplification properties of vacuum ultraviolet Ar2* produced by infrared high-intensity laser”, Opt. Lett. vol. 36, no. 14, pp. 2719-2721 (July 2011).
Masahito Katto, Hironari Zushi, Wataru Nagaya, Shinya Harano, Ryota Matsumoto, Atsushi Yokotani, Masanori Kaku, Shoichi Kubodera, and Noriaki Miyanaga, “Development of ultra-short pulse VUV laser system for nanoscale processing”, Appl. Phys. A vol. 101, no. 2, pp. 297-301 (November 2010).
Takashi Kurosawa, Akira Hosotani, Tadashi Ohmiya, Minoru Horikoshi, Masao Kanazawa, Masahito Katto Masanori Kaku, and Shoichi Kubodera, “Separation technique of raisins and stems utilizing characteristics of polarization”, Jpn. J. Appl. Phys. vol. 49, no. 9, pp. 098001-1-2 (September 2010).
Masahito Katto, Kazuyoshi Oda, Masanori Kaku, Atsushi Yokotani, Shoichi Kubodera, Noriaki Miyanaga, and Kunioki Mima, “Generation of subpicosecond vacuum ultraviolet pulses at 126 nm by using harmonics of a subpicosecond Ti:sapphire laser”, Opt. Commun. vol. 283, issue 3, pp. 414-416 (February 2010).
Membership of Academic Societies Japan Society of Applied Physics
Laser Society of Japan
Institute of Electrical Engineers of Japan
Optical Society of America, OSA
American Physical Society, APS
Institute of Electrical and Electronics Engineers, IEEE Photonics Society